產品詳情
TC10-HHH型振鏡是我司推出的一款超高性能型產品:具有超快的速度、超高的精度、穩定性好、抗干擾能力強等特點,綜合性能達到國內外同類型產品超高端技術水準。
TC10-HHH galvanometer is a super-high performance product which our company has introduced. It has the characteristics of super-fast speed, super-high precision, good stability and strong anti-jamming ability. Its comprehensive performance has reached the super-high-end technical level of similar products at home and abroad.
應用領域 Application area
微加工 Micromachining
標記、標刻 Marking and marking
醫療 Medical care
光學掃描、飛行打標 Optical scanning and flying marking
| 掃描電機參數 Scan Motor Specifications |
TC10-HHH |
| 非線性度 Nonlinearity |
< 2 mrad / 44° |
| 1%滿行程階躍響應時間 1% of full scale |
≤0.4ms |
| 跟蹤誤差時間 Tracking error |
0.15ms |
| 增益漂移 Gain error |
<20PPM/K |
| 零點漂移 Zero offset |
<8μRad./℃ |
| (預熱30分鐘后)老化漂移(8H) (after 30 min warm-up )Long-term drift(8H) |
<0.15mRad |
| 重復精度 Repeatability |
< 10μRad |
| 打標速度 Marking speed |
6500mm/s |
| 定位速度 Positioning speed |
15m/s |
| 掃描角度 Typical scan angle |
±0.35rad |
| 分辨率 Positioning resolution |
10μRad |
| 鏡片型號(nm) Reflection wavelength(nm) |
10600/1064/532/355 |
| 電源要求 Power Requirements |
±15VDC,max3A each |
| 通光孔徑 Aperture |
10.0mm |
| 工作溫度 Operating temperature |
25℃±10℃ |



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